Yang, SH Kong, H Lee, KR Park, S Kim, DE 2024-01-21T11:12:38Z 2024-01-21T11:12:38Z 2021-09-05 2002-01 0043-1648 https://pubs.kist.re.kr/handle/201004/139881 An experimental study was performed to discover the effect of environment on the tribological behavior of Si-incorporated diamond-like carbon (Si-DLC) film slid against a steel ball. The films were deposited on Si (10 0) wafers by a radio frequency glow discharge of mixtures of benzene and dilute silane gases. Experiments using a ball-on-disk test-rig were performed in vacuum, dry air and ambient air. It was observed that coefficient of friction decreased as the environment changed from vacuum to dry air. Results also showed that low and stable friction related closely to the smoothening of track surfaces and the formation of silicon-rich oxide debris. (C) 2002 Elsevier Science B.V All rights reserved. English ELSEVIER SCIENCE SA Effect of environment on the tribological behavior of Si-incorporated diamond-like carbon films Article 10.1016/S0043-1648(01)00856-0 1 WEAR, v.252, no.1-2, pp.70 - 79 WEAR 252 1-2 70 79 N scie scopus 000173372200008 2-s2.0-0036162533 Engineering, Mechanical Materials Science, Multidisciplinary Engineering Materials Science Article CHEMICAL-VAPOR-DEPOSITION COATINGS diamond-like carbon film plasma-assisted chemical vapor deposition silicon wear debris environment