Choi, CH Cho, WI Cho, BW Kim, HS Yoon, YS Tak, YS 2024-01-21T11:13:28Z 2024-01-21T11:13:28Z 2021-09-04 2002-01 1099-0062 https://pubs.kist.re.kr/handle/201004/139896 Lithium phosphorous oxynitride (Lipon) films were deposited in N-2 gas atmosphere with different radio-frequency magnetron sputtering power from 80 to 160 W with 20 W step increase. Upon films deposited at lower sputtering power showed higher ionic conductivities than the films deposited at higher sputtering power, The results of impedance measurements showed that nitrogen incorporation into the glass structure increased the ionic conductivity and this nitrogen content in the Lipon film,, increased as the sputtering power decreased. In addition, the Auger electron spectroscopy depth profile showed that the increased nitrogen content in the Upon films was not the result of the target surface poisoning effect but the result of reactive incorporation of nitrogen. (C) 2001 The Electrochemical Society. English ELECTROCHEMICAL SOC INC LI2SO4-LI2O-P2O5 GLASSES ELECTROLYTE SYSTEM BEHAVIOR Radio-frequency magnetron sputtering power effect on the ionic conductivities of upon films Article 10.1149/1.1420926 1 ELECTROCHEMICAL AND SOLID STATE LETTERS, v.5, no.1, pp.A14 - A17 ELECTROCHEMICAL AND SOLID STATE LETTERS 5 1 A14 A17 scie scopus 000172803200004 2-s2.0-0036218684 Electrochemistry Materials Science, Multidisciplinary Electrochemistry Materials Science Article LI2SO4-LI2O-P2O5 GLASSES ELECTROLYTE SYSTEM BEHAVIOR thin film