안창규 최승철 한성환 2024-01-21T12:03:41Z 2024-01-21T12:03:41Z 2022-01-10 2001-08 1229-7801 https://pubs.kist.re.kr/handle/201004/140268 한국세라믹학회 Preparation of AIN thin film with new type of single precursor 새로운 단일 전구체를 이용한 AIN 박막의 제조 Article 2 한국세라믹학회지 = Journal of the Korean Ceramic Society, v.38, no.8, pp.761 - 764. 한국세라믹학회지 = Journal of the Korean Ceramic Society 38 8 761 764. kci MOCVD