Kim, YM Choi, D Kim, KH Kim, J Han, SH Kim, HJ 2024-01-21T12:08:44Z 2024-01-21T12:08:44Z 2021-09-05 2001-07 0018-9464 https://pubs.kist.re.kr/handle/201004/140357 Co-Ni-Fe-N soft magnetic thin films with excellent high frequency characteristics were fabricated by a N-2 reactive A magnetron sputtering method. The nitrogen partial pressure (P-N2) was varied in the range of 0 similar to 10%. As P-N2 increases in this range, the saturation magnetization (B-s) linearly decreases from 19.8 kG to 14 kG and the electrical resistivity (rho) increased from 27 mu Omega cm to 155 mu Omega cm. The coercivity (H-c) exhibits the minimum value at 4% P-N2. The magnetic anisotropy field (H-k) are in the range of 20 similar to 40 Oe. High frequency characteristics Of (Co22.2Ni27.6Fe50.2)(100-x)N-x films are excellent in the range of 3 similar to 5% P-N2. Especially, the effective permeability of the film fabricated at 4% P-N2 is about 800, which is maintained up to 600 MHz. This film exhibits B-s, of 17.5 kG, H-c of 1.4 Oe, rho of 98 mu Omega cm, and H-k of about 25 Oe. The corrosion resistance of (Co22.2Ni27.6Fe50.2)(100-x)N-x. is improved with the increase of N concentration. English IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC High frequency characteristics of As-sputtered Co-Ni-Fe-N soft magnetic thin films Article 10.1109/20.951150 1 IEEE TRANSACTIONS ON MAGNETICS, v.37, no.4, pp.2288 - 2290 IEEE TRANSACTIONS ON MAGNETICS 37 4 2288 2290 scie scopus 000170910900324 2-s2.0-0035386760 Engineering, Electrical & Electronic Physics, Applied Engineering Physics Article; Proceedings Paper corrosion resistance high frequency characteristics soft magnetic thin films