Choi, HW Kim, KH Kim, J Han, SH Kim, HJ 2024-01-21T12:09:13Z 2024-01-21T12:09:13Z 2021-09-05 2001-07 0018-9464 https://pubs.kist.re.kr/handle/201004/140365 FeTiN and FeCrTiN thin films were prepared by reactive rf magnetron sputtering. Fe92.3Ti2.1N5.6 (at.%) films showed excellent thermal stability and soft magnetic properties; saturation magnetization (4 piM(s)) similar to. 19.5 kG, coercivity (H-c) similar to 1.2 Oe and effective permeability (mu (eff)) similar to 2000 at 100 MHz. However, the corrosion resistance behaviors of the FeTiN films were similar to those of other FeMN films. For improving the corrosion resistance of the FeTiN films without the deterioration of magnetic properties, Cr was added to the FeTiN films. In an as-deposited Fe90.3Cr1.2Ti1.1N7.4 film, the permeability reached about 2700 at 100 MHz and 4 piM(s) and H-c showed similar to 18.6 kG and 1.5 Oe, respectively. From XRD and TEM results, the sizes of alpha -Fe grains in the FeTiN and FeCrTiN films were observed to be below 10 nm and the grain orientations of the FeCrTiN films were more evenly distributed than the FeTiN films. Also, an addition of Cr in FeTiN films improved the corrosion resistance without the deterioration of soft magnetic properties on FeCrTiN films, caused by the formation of passivation layers in their surface. English IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC RECORDING-HEADS The effect of Cr addition on structure and corrosion resistance in FeTiN nanocrystalline soft magnetic thin films Article 10.1109/20.950964 1 IEEE TRANSACTIONS ON MAGNETICS, v.37, no.4, pp.1773 - 1775 IEEE TRANSACTIONS ON MAGNETICS 37 4 1773 1775 scie scopus 000170910900164 2-s2.0-0035386524 Engineering, Electrical & Electronic Physics, Applied Engineering Physics Article; Proceedings Paper RECORDING-HEADS corrosion resistance nanocrystalline passivation layer thermal stability thin film head materials