Park, CW Moon, S Kim, YH Han, TS Oh, MW Chung, HB 2024-01-21T12:09:23Z 2024-01-21T12:09:23Z 2021-09-05 2001-07 0374-4884 https://pubs.kist.re.kr/handle/201004/140368 We analyzed and compared the characteristics of VOx and Y1-xPrxBa2Cu3O7-delta to find a new material for the IR absorbing layer of a microbolometer. We fabricated VOx thin films by using the RF reactive sputtering method and Y1-xPrxB2Cu3O7-delta pellets with different percents of Pr by using the sintering method. We changed the O-2/Ar ratio and the substrate temperature. The TCR (temperature coefficient of resistance) measurement was carried out to estimate the IR detectivity of the samples. XRD (X-ray diffraction) and EDS (energy distribution spectroscopy) analyses were used to find the characteristics: of the samples. In the case of VOx, the TCR value was about -2 %/K, and in the case of Y1-xPrxBa2Cu3O7-delta, it was about -1.0 %/K. English KOREAN PHYSICAL SOC YBACUO THIN-FILMS A comparative study of the characteristics of VOx and Y1-xPrxBa2Cu3O7-delta for an uncooled IR detector Article 1 JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.39, no.1, pp.49 - 52 JOURNAL OF THE KOREAN PHYSICAL SOCIETY 39 1 49 52 scie scopus kci other 000169870600013 2-s2.0-0035637616 Physics, Multidisciplinary Physics Article YBACUO THIN-FILMS VOx