주병권 김현호 이시형 이전국 김수원 2024-01-21T12:13:34Z 2024-01-21T12:13:34Z 2022-01-10 2001-06 0254-4172 https://pubs.kist.re.kr/handle/201004/140443 大韓電氣學會 Fabrication and characterization of suspended-type thin film resonator using SOI-micromachining process SOI 마이크로 머시닝 공정을 이용한 suspended-type 박막공진기의 제작 및 특성평가 Article 3 전기학회논문지 = Transactions of the Korean Institute of Electrical Engneers, v.50, no.6, pp.303 - 306 전기학회논문지 = Transactions of the Korean Institute of Electrical Engneers 50 6 303 306 thin film resonator soi