Lim, JH Choi, DJ Kim, HK Cho, WI Yoon, YS 2024-01-21T12:41:18Z 2024-01-21T12:41:18Z 2021-09-05 2001-03 0013-4651 https://pubs.kist.re.kr/handle/201004/140676 An all solid-state thin film supercapacitor (TFSC) was fabricated with an amorphous ruthenium oxide (RuO2) thin film electrode and an amorphous LixPOyNz (Lipon) thin film electrolyte. The electrochemical behavior of the RuO2/Lipon/RuO2/Pt TFSC was characterized by a charge-discharge technique in the potential range of 0-2 V. The RuO2/Lipon/RuO2/Pt TFSC exhibited a behavior of a bulk-type supercapacitor, even though the capacity of an as-fabricated TFSC was found to be much lower than the bulk one and showed a rapid decrease in capacity. This can be explained by excess oxygen ions and interfacial structure modification. The discharge yield dropped by 53% after 500 cycles. The capacitance per volume of the RuO2/Lipon/RuO2/Pt TFSC at the first cycle is 38 mF/cm(2) mum. (C) 2001 The Electrochemical Society. All rights reserved. English ELECTROCHEMICAL SOC INC RUTHENIUM OXIDE Thin film supercapacitors using a sputtered RuO2 electrode Article 10.1149/1.1350666 1 JOURNAL OF THE ELECTROCHEMICAL SOCIETY, v.148, no.3, pp.A275 - A278 JOURNAL OF THE ELECTROCHEMICAL SOCIETY 148 3 A275 A278 scie scopus 000167545700014 Electrochemistry Materials Science, Coatings & Films Electrochemistry Materials Science Article RUTHENIUM OXIDE