Jun, Y Choi, JY Lee, KR Jeong, BK Kwon, SK Hwang, CH 2024-01-21T13:05:23Z 2024-01-21T13:05:23Z 2021-09-05 2000-12-01 0040-6090 https://pubs.kist.re.kr/handle/201004/140840 The surface properties of spacer tools, which are sliding between grid plates of electron gun for cathode ray tube (CRT) to control the space gap between the plates, are very crucial. The scratches can be made by the friction on the surface of plates when these tools are sliding in and out between the plates. Since the gap and surface scratch of the grid plates play major roles in the performance of the electron gun and the electron beam coming out from the cathode of CRT, it was very important to keep the surface of tools smooth and clean. Furthermore, the productivity of the electron gun assembly process is significantly dependent on the friction between the tool and the plate surface. Diamond-like carbon (DLC) film of 800-nm thickness was deposited on both surfaces of the spacer tools to improve the tribological properties and wear resistance. The film was deposited by a plasma enhanced CVD method using a 13.56 MHz radio frequency with benzene. Si intermediate layers were used to improve the adhesion of DLC film. Process parameters for Ar cleaning and Si intermediate layers were optimized in the viewpoint of adhesion improvement of DLC films to tool steel substrates. The field test in the electron gun assembly line showed that the coated tools reduced the extraction force to 20-75% of those when using uncoated tools. Both the number and the size of surface scratches in the grid plates were significantly reduced when using the DLC coated spacer tools. (C) 2000 Elsevier Science B.V. All rights reserved. English ELSEVIER SCIENCE SA CHEMICAL-VAPOR-DEPOSITION THIN-FILMS MECHANICAL-PROPERTIES ADHESION COATINGS SILICON WEAR Application of diamond-like carbon films to spacer tools for electron guns of cathode ray tube (CRT) Article 10.1016/S0040-6090(00)01430-9 1 THIN SOLID FILMS, v.377, pp.233 - 238 THIN SOLID FILMS 377 233 238 scie scopus 000166024600040 2-s2.0-17544399075 Materials Science, Multidisciplinary Materials Science, Coatings & Films Physics, Applied Physics, Condensed Matter Materials Science Physics Article; Proceedings Paper CHEMICAL-VAPOR-DEPOSITION THIN-FILMS MECHANICAL-PROPERTIES ADHESION COATINGS SILICON WEAR DLC coated tool for electron gun rf-PACVD Si buffer layer