Lee, KR Eun, KY Kim, I Kim, J 2024-01-21T13:05:33Z 2024-01-21T13:05:33Z 2021-09-05 2000-12-01 0040-6090 https://pubs.kist.re.kr/handle/201004/140843 Diamond-like carbon (DLC) has been a candidate for various applications due to its excellent tribological and mechanical properties. However, poor adhesion on tool steels limits its applications over a wide range. In the present work, we investigated the effect of W and W-C intermediate layers on the adhesion of DLC films to AISI D2 tool steels. The intermediate layers were deposited by de magnetron sputtering and the DLC films were deposited on the various intermediate layers by rf-PACVD. Adhesion of the DLC film was significantly improved by introducing W and W-C intermediate layers. The adhesion was strongly dependent on the thickness of W layer and the CH4 fraction in the sputtering gas during the intermediate layer deposition. TEM cross section revealed that, in addition to the chemical compatibility between carbon and the intermediate layer materials, the microstructure of the intermediate layer is also important to improve the adhesion. Columnar grains of the intermediate layers and structural continuity between the W and W-C mixed layers were the significant factors affecting the adhesion of DLC films. (C) 2000 Elsevier Science B.V. All rights reserved. English ELSEVIER SCIENCE SA CARBON-FILMS THIN-FILMS INTERMEDIATE LAYERS COATINGS DEPOSITION CARBIDE Design of W buffer layer for adhesion improvement of DLC films on tool steels Article 10.1016/S0040-6090(00)01429-2 1 THIN SOLID FILMS, v.377, pp.261 - 268 THIN SOLID FILMS 377 261 268 scie scopus 000166024600045 2-s2.0-0343371542 Materials Science, Multidisciplinary Materials Science, Coatings & Films Physics, Applied Physics, Condensed Matter Materials Science Physics Article; Proceedings Paper CARBON-FILMS THIN-FILMS INTERMEDIATE LAYERS COATINGS DEPOSITION CARBIDE DLC films adhesion W buffer layer AISI D2