이시형 이전국 김상희 김종헌 윤기현 2024-01-21T13:06:19Z 2024-01-21T13:06:19Z 2022-01-10 2000-12 1229-7801 https://pubs.kist.re.kr/handle/201004/140856 한국세라믹학회 AlN-Si Thin Film Bulk Acoustic Over-moded Resonator AlN 압전 박막과 Si을 이용한 체적탄성파 Over-moded 공진기 Article 2 한국세라믹학회지 = Journal of the Korean Ceramic Society, v.37, no.12, pp.1198 - 1203 한국세라믹학회지 = Journal of the Korean Ceramic Society 37 12 1198 1203 over-moded resonator RF sputtering AIN thin film bulk acoustic wave resonator c-axis orientation coupling coefficient