Park, YJ Baik, YJ Choi, JH Lee, JY Hahn, JH 2024-01-21T13:14:06Z 2024-01-21T13:14:06Z 2021-09-04 2000-11 0884-2914 https://pubs.kist.re.kr/handle/201004/140996 BN films consisting of c-BN and h-BN phases were synthesized using an ion-beam-assisted deposition process. In contrast to conventional observations, the c-BN and h-BN phases did not form separate layers, but were distributed in the form of nano-sized grains throughout the film thickness. No distinctly aligned h-BN layer was observed before the c-BN phase. Such a mixed character of the film was attributed to a localized ion bombardment effect instead of the macro-stress. Possibly because of the presence of scattered h-BN phases, the thin film described here possessed a low hardness of about 20 GPa and a low stress of about 5 GPa, compared with other reported c-BN-containing films. English MATERIALS RESEARCH SOCIETY Microstructural observation of a composite film of c-BN and h-BN phases Article 1 JOURNAL OF MATERIALS RESEARCH, v.15, no.11, pp.2292 - 2295 JOURNAL OF MATERIALS RESEARCH 15 11 2292 2295 N scie scopus 000165275400006 2-s2.0-0034333855 Materials Science, Multidisciplinary Materials Science Article CUBIC BORON-NITRIDE BEAM-ASSISTED DEPOSITION THIN-FILMS GRAIN-BOUNDARY GROWTH c-BN