Lee, JK Park, D Cheong, DS Park, JW Park, CS 2024-01-21T13:43:55Z 2024-01-21T13:43:55Z 2021-09-04 2000-07 0734-2101 https://pubs.kist.re.kr/handle/201004/141267 Pb(Mg1/3Nb2/3)O-3-PbTiO3 (PMN-PT) films were deposited by the radio-frequency magnetron sputtering technique with Pb- and Mg-enriched ceramic targets. The perovskite structural growth was carried out over a wide range of processing parameters, PMN-PT targets were synthesized by the columbite technique. Surface cracking was due to the residual stress induced by low-temperature deposition. To reduce the surface-layer delamination, the substrate temperature during deposition was increased to 500 degrees C. Even though the amount of the perovskite phase decreased, the surface morphology was free of macrodelaminations and better than the case of room-temperature deposition. By stress releasing, high-temperature deposition reduces the delaminations of the PMN-PT thin films on the Pt/Ti/SiO2/Si substrate. By controlling the sputtered-particle kinetic energy and the film composition, the surface morphologies were changed to be smooth and delamination-free. (C) 2000 American Vacuum Society. [S0734-2101(00)13204-X]. English AMER INST PHYSICS LEAD MAGNESIUM NIOBATE ELECTROMECHANICAL PROPERTIES MICROSTRUCTURE Phase development of radio-frequency magnetron sputter-deposited Pb(Mg1/3Nb2/3)O-3-PbTiO3 (90/10) thin films Article 10.1116/1.582402 1 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, v.18, no.4, pp.1659 - 1662 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS 18 4 1659 1662 scie scopus 000088277000023 2-s2.0-0034229541 Materials Science, Coatings & Films Physics, Applied Materials Science Physics Article; Proceedings Paper LEAD MAGNESIUM NIOBATE ELECTROMECHANICAL PROPERTIES MICROSTRUCTURE RF sputtering Pb(Mg₁/₃Nb₂/₃)O₃-PbTiO₃ thin film perovskite nanocomposite