Yong Jenong Kim Tae Joon Kim Tae-Kyung Kim Byungwoo Park 송종한 2024-01-21T14:00:58Z 2024-01-21T14:00:58Z 2022-01-10 2000-06 1225-8822 https://pubs.kist.re.kr/handle/201004/141311 English 한국진공학회 Activation energy for the loss of substitutional carbon in Si0.984C0.016 grown by solid phase epitaxy Article 2 한국진공학회지, v.4, no.2, pp.50 - 54 한국진공학회지 4 2 50 54 N other SPE FTIR HR-XRD substitutional carbon RTA