Baik, ES Baik, YJ Jeon, D 2024-01-21T14:11:31Z 2024-01-21T14:11:31Z 2021-09-04 2000-04 0884-2914 https://pubs.kist.re.kr/handle/201004/141497 We investigated the formation of nanowhiskers by means of air plasma dry etching using diamond films of two different kinds: as-grown diamond films and films with molybdenum (Mo) deposits. As for the as-grown diamond films, nanowhiskers were found to form preferentially at grain boundaries of diamond crystals. Auger depth profile analysis of the etched films revealed a progressive enrichment by Mo toward the whisker tip, resulting from accidental sputtering of Mo substrate holder. With dry etching of diamond films with preformed Mo deposits, well-aligned whiskers 100 nm in diameter were found to form uniformly over the entire film surface with a population density of 30/mu m(2). From these findings, it follows that Mo deposits serve as micromasks for the formation of the nanowhiskers. It was; also confirmed that these whiskers showed excellent field-emission behavior. English MATERIALS RESEARCH SOCIETY ELECTRON-EMISSION FIELD-EMISSION FILMS Aligned diamond nanowhiskers Article 10.1557/JMR.2000.0131 1 JOURNAL OF MATERIALS RESEARCH, v.15, no.4, pp.923 - 926 JOURNAL OF MATERIALS RESEARCH 15 4 923 926 scie scopus 000086368700014 2-s2.0-0034174605 Materials Science, Multidisciplinary Materials Science Article ELECTRON-EMISSION FIELD-EMISSION FILMS diamond nana-whiskers