Baik, FS Baik, YJ Jeon, D 2024-01-21T14:42:46Z 2024-01-21T14:42:46Z 2021-09-05 1999-12 0925-9635 https://pubs.kist.re.kr/handle/201004/141796 We have fabricated an array of cone-shaped diamond tips for use as a field electron emitter by air-plasma etching a polycrystalline diamond film with a silicon oxide mask. The difference in etching speed between the mask and the diamond resulted in the formation of cone-shaped diamond tips. Post-treatment with hydrogen plasma was effective in cleaning the diamond tips and increasing the surface conductivity. The emission from the diamond tips was measured with a diode configuration. The threshold field was 3 V mu m(-1), and the emission current was 0.8 nA tip(-1) when the held was raised to 10 V mu m(-1). (C) 1999 Elsevier Science S.A. All rights reserved. English ELSEVIER SCIENCE SA FIELD-EMITTER-ARRAY EMISSION ELECTRON FILMS Diamond tip fabrication by air-plasma etching of diamond with an oxide mask Article 1 DIAMOND AND RELATED MATERIALS, v.8, no.12, pp.2169 - 2171 DIAMOND AND RELATED MATERIALS 8 12 2169 2171 scie scopus 000083867300011 2-s2.0-0033328543 Materials Science, Multidisciplinary Materials Science, Coatings & Films Physics, Applied Physics, Condensed Matter Materials Science Physics Article FIELD-EMITTER-ARRAY EMISSION ELECTRON FILMS conical shape diamond micro-tips array dirty etching process facetting of mask