Ahn, SH Lee, KR Eun, KY Jeon, D 2024-01-21T15:01:10Z 2024-01-21T15:01:10Z 2021-09-05 1999-11 0257-8972 https://pubs.kist.re.kr/handle/201004/141866 Micromachined Si tips have been considered as a strong candidate for cold cathode materials. However, as-prepared Si tips showed unstable emission behavior, presumably due to native oxide, chemical reaction with residual gases or changes in tip geometry during operation. In order to stabilize the emission behavior, diamond-like carbon (DLC) films were deposited on the Si tips by DC magnetron sputtering of high purity graphite. We focused on the stability of the emission behavior by repeating the I-V measurement with anode voltages ranging from 100 to 2500 V. With increasing number of I-V measurements, the onset electric field decreased in both as-prepared and DLC-coated Si tips. However, the emission current of as-prepared Si tips decreased with increasing number of I-V measurements and eventually could not be observed after 10 measurements. On the other hand, DLC-coated tips exhibited improved emission behavior by repeating the I-V measurement. These results showed that the DLC coating can prevent the Si tips from oxidation or from being contaminated, which stabilized the field emission behavior. Furthermore, the DLC coating seems to reduce the effect of the changes in tip apex morphology by reducing the sharpness of the tip apex. (C) 1999 Elsevier Science S.A. All rights reserved. English ELSEVIER SCIENCE SA SILICON TIPS FABRICATION EMITTERS INSTABILITY ARRAYS Stabilized field emission behavior of diamond-like carbon-coated Si tips Article 10.1016/S0257-8972(99)00367-9 1 SURFACE & COATINGS TECHNOLOGY, v.120, pp.734 - 739 SURFACE & COATINGS TECHNOLOGY 120 734 739 scie scopus 000084051900117 2-s2.0-0033504665 Materials Science, Coatings & Films Physics, Applied Materials Science Physics Article; Proceedings Paper SILICON TIPS FABRICATION EMITTERS INSTABILITY ARRAYS diamond-like carbon field emission Si-tip sputtering