Park, YW Yoon, SJ Lee, J Baik, YJ Kim, HJ Jung, HJ Choi, WK Cho, BH Park, CY 2024-01-21T15:14:18Z 2024-01-21T15:14:18Z 2021-09-05 1999-07 0374-4884 https://pubs.kist.re.kr/handle/201004/142085 Due to its high Young's modulus, diamond has the highest acoustic wave velocity among all materials and is expected to be a candidate substrate for high-frequency surface acoustic wave (SAW) devices. In this study, the deposition of ZnO, as a piezoelectric layer, on a diamond substrate is investigated. ZnO has been fabricated by using RF magnetron sputtering with a ZnO target and various Ar/O-2 gas ratios, RF powers, and substrate temperatures at a vacuum of 10(-5) Torr. The sputtered ZnO films are characterized by X-ray diffraction (XRD), Rutherford backscattering spectroscopy (RBS), X-ray photoelectron spectroscopy (XPS), and I-V characteristics. All the films show only a (002) orientation, The atomic concentration of the sputtered ZnO films is changed by the oxygen gas ratio, and the ZnO films are grown with a homogeneous composition over their entire thickness. The electrical resistivity of the films varied from 4x10(3) to 7x10(8) Ohm cm, depending on the Ar/O-2 gas ratio. The phase velocity achieved by using the ZnO/IDT/diamond structure was about 6,000 m/sec. English KOREAN PHYSICAL SOC ZNO FILMS Characteristics of ZnO/diamond thin films prepared by RF magnetron sputtering Article 1 JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.35, pp.S517 - S520 JOURNAL OF THE KOREAN PHYSICAL SOCIETY 35 S517 S520 scie scopus 000081827900114 2-s2.0-0033453739 Physics, Multidisciplinary Physics Article; Proceedings Paper ZNO FILMS diamond SAW