Jung, JH Ju, BK Lee, YH Jang, J Oh, MH 2024-01-21T15:44:47Z 2024-01-21T15:44:47Z 2021-09-04 1999-03 1071-1023 https://pubs.kist.re.kr/handle/201004/142384 The emission stability of Mo-tip field emitter arrays (FEAs) has been improved. The effect of diamond-like carbon (DLC) films deposited using a layer-by-layer technique using plasma enhanced chemical vapor deposition on the electron emission characteristics of Mo-tip FEAs was examined. The turn-on voltage was lowered from 80 V for Mo-tip FEAs to 65 V for DLC-coated Mo-tip FEAs, and the maximum emission current increased from 140 mu A for Mo-tip FEAs to 320 mu A for DLC-coated Mo-tip FEAs composed of 900 emitters. An anode current for DLC-coated Mo-tip FEAs and Mo tip of 0.1 mu A per emitter was measured at gate voltages of about 87 and 107 V, respectively. The emission current of DLC-coated Mo-tip FEAs is more stable than that of Mo-tip FEAs. (C) 1999 American Vacuum Society. [S0734-211X(99)07602-7]. English AMER INST PHYSICS Emission stability of a diamond-like carbon coated metal-tip field emitter array Article 10.1116/1.590581 1 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.17, no.2, pp.486 - 488 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 17 2 486 488 scie scopus 000079759500039 2-s2.0-0003895585 Engineering, Electrical & Electronic Nanoscience & Nanotechnology Physics, Applied Engineering Science & Technology - Other Topics Physics Article