Kang, HK Kim, TH Moon, S Jung, JH Oh, MH 2024-01-21T16:12:26Z 2024-01-21T16:12:26Z 2021-09-03 1999-01 1071-1023 https://pubs.kist.re.kr/handle/201004/142622 The nitrogen-doped diamond-like-carbon (DLC) coating on the molybdenum field emitter arrays (Mo-FEAs) was reported to improve the electron emission characteristics. The plasma enhanced chemical vapor deposition method using a layer-by-layer technique was applied to deposit DLC films. Field emission characteristics were measured and the possibility of applying N-doped DLC coated emitters to high frequency vacuum devices was reported. The turn-on voltage of DLC coated FEAs was decreased from 75 to 55 V and the emission current was more stable than that of noncoated FEAs. The total transconductance of FEAs was increased and the effective work function of emitters was reduced by the N-type DLC coating. (C) 1999 American Vacuum Society. [S0734-211X(99)02101-0]. English AMER INST PHYSICS CHEMICAL-VAPOR-DEPOSITION ARRAY DEVELOPMENT PLASMA FILM STABILITY Enhancement of emission characteristics for field emitters by N-doped hydrogen-free diamond-like-carbon coating Article 10.1116/1.590507 1 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.17, no.1, pp.246 - 249 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 17 1 246 249 scie scopus 000078654300043 Engineering, Electrical & Electronic Nanoscience & Nanotechnology Physics, Applied Engineering Science & Technology - Other Topics Physics Article CHEMICAL-VAPOR-DEPOSITION ARRAY DEVELOPMENT PLASMA FILM STABILITY enhancement field emission hydrogen-free DLC