Antonova, T Bougrov, G Bougrova, A Choi, WK Goncharov, L Jung, HJ Koh, SK Kondranin, S Kralkina, E Sitin, E Obukhov, V 2024-01-21T16:16:46Z 2024-01-21T16:16:46Z 2021-09-03 1998-12 0021-4922 https://pubs.kist.re.kr/handle/201004/142698 In the present paper the possibility of application of the regularization method for reliable determination of the position and form of structural features of electron energy distribution is considered. The regularization method is used in the processing of the probe characteristics, measured in gas discharge chambers of broad beam gridded Xe ion sources, with peripheral and with divergent magnetic fields, as well as in an ion accelerator with closed electron drift. Electron energy distribution functions with secondary maxima are observed in the plasma devices. English JAPAN J APPLIED PHYSICS Study of electron energy distribution functions (EEDFs) in three DC low-pressure plasma sources Article 10.1143/JJAP.37.6906 1 JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, v.37, no.12B, pp.6906 - 6915 JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS 37 12B 6906 6915 scie scopus 000078699200048 2-s2.0-19644383873 Physics, Applied Physics Article; Proceedings Paper regularization method electron energy distribution function broad beam gridded Xe ion sources peripheral/divergent magnetic field