Park, HH Jin, IS Kim, DH Kim, TS 2024-01-21T16:32:56Z 2024-01-21T16:32:56Z 2022-01-11 1998-11-02 0040-6090 https://pubs.kist.re.kr/handle/201004/142737 The effect of excess Pb and O content on the ferroelectric properties of Pb(Zr0.52Ti0.48)O-3/Pt system has been investigated. PZT films were sputter-deposited from a target containing 50% excess Pb and O on a substrate heated at 520 degrees C. This permitted the PZT films to be crystallized directly to a perovskite phase. The excess content of Pb and O in the sputter-deposited PZT films were controlled by successive furnace-annealing at 500 degrees C by varying the annealing time. Polarization-switching field (P-E), current-applying electric field (I-E), and fatigue property measurements were done after rapid thermal annealing (RTA) of the films at 600 and 700 degrees C. The 700 degrees C-treated PZT film containing 26% of excess Pb before RTA showed better ferroelectric properties than the 600 degrees C-treated film. On the contrary, a degradation of ferroelectric properties was observed with the 700 degrees C-treated films containing 17 or 5% of excess Pb before RTA. These two opposed effects of high temperature-RTA treatment on the ferroelectric properties of the PZT films could be explained using a space charge model. (C) 1998 Elsevier Science S.A. All rights reserved. English ELSEVIER SCIENCE SA THIN-FILMS Effect of excess Pb and O content on the ferroelectric properties of sputter deposited Pb(Zr0.52Ti0.48)O-3/Pt system Article 10.1016/S0040-6090(98)01265-6 1 THIN SOLID FILMS, v.332, no.1-2, pp.300 - 304 THIN SOLID FILMS 332 1-2 300 304 scie scopus 000077202500055 2-s2.0-0032476233 Materials Science, Multidisciplinary Materials Science, Coatings & Films Physics, Applied Physics, Condensed Matter Materials Science Physics Article; Proceedings Paper THIN-FILMS PZT excess Pb and O space charge model fatigue