배귀남 2024-01-21T16:34:07Z 2024-01-21T16:34:07Z 2022-01-10 1998-11 1226-4881 https://pubs.kist.re.kr/handle/201004/142757 대한기계학회 Performance characteristics of in-situ particle monitors at sub-atmospheric pressures 감압상태에서 In-Situ particle monitor의 성능특성 Article 2 대한기계학회논문집B = Transactions of the Korean Society of Mechanical Engineers B, v.22, no.11, pp.1564 - 1570 대한기계학회논문집B = Transactions of the Korean Society of Mechanical Engineers B 22 11 1564 1570 in-situ particle mointor subatmospheric pressure detection efficiency lower detection limit particle size response 실시간 입자측정기 감압 측정효율 최소 측정입경 입자크기 반응