주병권 오명환 2024-01-21T16:40:50Z 2024-01-21T16:40:50Z 2022-01-10 1998-09 https://pubs.kist.re.kr/handle/201004/142873 FED의 최신기술 개발동향 Article 3 전자부품 = The Electronic Parts & Components Monthly, pp.22 - 27 전자부품 = The Electronic Parts & Components Monthly 22 27 MEMS