Park, KH Kim, MW Byun, YT Kim, SH Cho, WR Park, SH Kim, U Choi, SS 2024-01-21T16:41:45Z 2024-01-21T16:41:45Z 2021-09-03 1998-09 0021-4922 https://pubs.kist.re.kr/handle/201004/142889 A novel technique for fabricating negative tone patterns fur waveguide devices, using laser beam writing is proposed. An optoelectronic device pattern with good contrast and a smooth curve is generated. Our proposed technique can extend the applications of laser beam writing to the fabrication of the optoelectronic devices. English JAPAN J APPLIED PHYSICS Negative pattern generation technique by laser beam writing for integrated optics Article 10.1143/JJAP.37.4844 1 JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, v.37, no.9A, pp.4844 - 4845 JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS 37 9A 4844 4845 scie scopus 000076313200035 2-s2.0-0032154636 Physics, Applied Physics Article laser beam writing lithography integrated optics waveguide semiconductor