주병권 이덕중 이윤희 이남양 한정인 조경익 오명환 2024-01-21T16:43:54Z 2024-01-21T16:43:54Z 2022-01-10 1998-08 0254-4172 https://pubs.kist.re.kr/handle/201004/142925 大韓電氣學會 Improvement of bonding properties by pre-bonding at room temperature in Si-glass electrostatic bonding process 실리콘 - 유리 정전 열 접합에 있어서 상온 예비 접합에 의한 접합 특성의 개선 Article 3 전기학회논문지 = Transactions of the Korean Institute of Electrical Engneers, v.47, no.8, pp.1269 - 1276 전기학회논문지 = Transactions of the Korean Institute of Electrical Engneers 47 8 1269 1276 modified electrostatic bonding hydrophilization initial Van der Waals bonding stabilization Si-glass bonding