Lim, SH Han, SH Kim, HJ Choi, YS Choi, JW Ahn, CH 2024-01-21T17:01:05Z 2024-01-21T17:01:05Z 2021-09-03 1998-07 0018-9464 https://pubs.kist.re.kr/handle/201004/142979 Si microcantilevers coated with giant magnetostrictive Sm-Fe or Tb-Fe thin films are fabricated and the deflection of the cantilevers is measured as a function of magnetic field. In the case of a microcantilever with the dimension 3.7 mm (length) x 1.0 mm (width) x 13 mu m (thickness), for example, a very large deflection of 52 mu m is achieved at 150 Oe from the first ascending magnetic field, by the coating of a Sm42.7Fe56.9B0.4 thin film with the thickness of 1.2 mu m. Total deflection doubles when a magnetic field of the same amplitude (150 Oe) is applied alternately in the length and the width directions. Relatively large deflections are also observed for Tb-Fe thin film based microcantilevers as well as other Sm-Fe based cantilevers. The level of deflection achieved in the present magnetostrictive microcantilevers is considered to be suitable for microdevices applications. English IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC Prototype microactuators driven by magnetostrictive thin films Article 10.1109/20.706786 1 IEEE TRANSACTIONS ON MAGNETICS, v.34, no.4, pp.2042 - 2044 IEEE TRANSACTIONS ON MAGNETICS 34 4 2042 2044 scie scopus 000074852300394 2-s2.0-33747928614 Engineering, Electrical & Electronic Physics, Applied Engineering Physics Article; Proceedings Paper magnetostrictive thin films microcantilevers Sm-Fe alloys Tb-Fe alloys