Ryu, HJ Kim, SD Lee, JJ Kim, J Han, SH Kim, HJ Ahn, CH 2024-01-21T17:01:09Z 2024-01-21T17:01:09Z 2021-09-03 1998-07 0018-9464 https://pubs.kist.re.kr/handle/201004/142980 There have been remarkable advances in semiconductor industry but the miniaturization of magnetic devices is progressed very slowly. So many studies are carried out overcoming the gap. To develop small size devices, proper design and property simulation of the devices are requested to spare the efforts before fabrication processes. However, there is a few of simulation studies have been reported. In this work, we fabricated thin film toroidal inductors using permalloy as a core material and measured the properties to estimate 2D and 3D simulation in the magnetic devices. The 3D simulation shows more agreeable results than the 2D simulation. On the other hand, when we changed core materials, the inductor using Fe-Hf-C-N nanocrystalline alloys as core material shows the better properties than using permalloy and Fe-Zr-C-N alloys. English IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC 2D and 3D simulation of toroidal type thin film inductors Article 10.1109/20.706548 1 IEEE TRANSACTIONS ON MAGNETICS, v.34, no.4, pp.1360 - 1362 IEEE TRANSACTIONS ON MAGNETICS 34 4 1360 1362 scie scopus 000074852300175 Engineering, Electrical & Electronic Physics, Applied Engineering Physics Article; Proceedings Paper simulation thin film toroidal inductor