Sakamoto, SR Ozturk, C Byun, YT Ko, J Dagli, N 2024-01-21T17:01:40Z 2024-01-21T17:01:40Z 2021-09-01 1998-07 1041-1135 https://pubs.kist.re.kr/handle/201004/142989 Low-loss single-mode semiconductor rib optical waveguides fabricated in GaAs-AlGaAs epitaxial layers are removed from GaAs substrates and bonded to transfer substrates using a benzocyclobutene organic polymer, Optical quality facets were obtained by cleaving through the transfer substrate. An average propagation loss of 0.39 and 0.48 dB/cm at 1.55 mu m wavelength for TE and TM polarizations, respectively, were measured. This was on average 0.05 dB/cm greater than control guides fabricated in GaAs-AlGaAs epilayers on GaAs substrates with air as the top cladding, This demonstrates the feasibility of a process enabling semiconductor polymer integration and processing both sides of an epitaxial layer. English IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC WAVE-GUIDES Low-loss substrate-removed (SURE) optical waveguides in GaAs-AlGaAs epitaxial layers embedded in organic polymers Article 10.1109/68.681292 1 IEEE PHOTONICS TECHNOLOGY LETTERS, v.10, no.7, pp.985 - 987 IEEE PHOTONICS TECHNOLOGY LETTERS 10 7 985 987 scie scopus 000074191900024 2-s2.0-0032121503 Engineering, Electrical & Electronic Optics Physics, Applied Engineering Optics Physics Article WAVE-GUIDES GaAs-AlGaAs materials/devices optical device fabrication optical waveguides optoelectronic devices organic polymer materials/devices