Bae, GN Kinney, PD Liu, BYH Pui, DYH 2024-01-21T17:05:49Z 2024-01-21T17:05:49Z 2021-09-03 1998-06 0278-6826 https://pubs.kist.re.kr/handle/201004/143060 The spatial distribution of aerosol particles downstream of a critical orifice has been experimentally investigated. The measurements were performed by filtering the aerosol and visualizing the filter deposits. Measurements were made for a range of flow rates, pressures, and particle sizes. The most significant observation was that the particle spatial distributions changed from uniform to nonuniform when the downstream pressure was lowered below about 10 torr. Similar observations were made using in-situ particle monitors. These results may have significance for understanding particulate contamination in vacuum-based semiconductor process equipment. (C) 1998 American Association for Aerosol Research. English ELSEVIER SCIENCE INC PARTICLES CONTAMINATION EQUIPMENT NOZZLE VACUUM Investigation of aerosol spatial distributions downstream of a critical orifice at low pressure Article 10.1080/02786829808965539 1 AEROSOL SCIENCE AND TECHNOLOGY, v.28, no.6, pp.479 - 488 AEROSOL SCIENCE AND TECHNOLOGY 28 6 479 488 scie scopus 000074114900001 2-s2.0-0345337265 Engineering, Chemical Engineering, Mechanical Environmental Sciences Meteorology & Atmospheric Sciences Engineering Environmental Sciences & Ecology Meteorology & Atmospheric Sciences Article PARTICLES CONTAMINATION EQUIPMENT NOZZLE VACUUM Aerosol