Lee, S Lee, S Jeon, D Lee, KR Ju, BK Oh, MH 2024-01-21T17:08:36Z 2024-01-21T17:08:36Z 2021-09-03 1998-05 1071-1023 https://pubs.kist.re.kr/handle/201004/143107 Coating silicon field emitter tips with a thin film of diamondlike carbon (DLC) seems to be a promising way to improve the performance of the silicon emitter tips. If one deposits a DLC film directly onto the gated silicon emitter, DLC will contaminate the side wall of the insulating layer, which can cause a large leakage current to the gate. To prevent the contamination of the side wall, we deposited an aluminum sacrificial layer before coating the DLC film. The gate current measured from the DLC-coated emitters using the sacrificial layer was less than 3% of the anode current. (C) 1998 American Vacuum Society. English A V S AMER INST PHYSICS EMISSION Fabrication of diamondlike carbon-coated field emitter triode using aluminum parting layer Article 10.1116/1.589983 1 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.16, no.3, pp.1203 - 1206 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 16 3 1203 1206 scie scopus 000074298300046 2-s2.0-0342886878 Engineering, Electrical & Electronic Nanoscience & Nanotechnology Physics, Applied Engineering Science & Technology - Other Topics Physics Article; Proceedings Paper EMISSION field emission 다이아몬드상 카본 field emission