Jung, JH Ju, BK Kim, H Oh, MH Chung, SJ Jang, J 2024-01-21T17:15:37Z 2024-01-21T17:15:37Z 2021-09-03 1998-03 1071-1023 https://pubs.kist.re.kr/handle/201004/143228 We have studied the enhancement of field-emission characteristics by hydrogen-free nitrogen-doped diamondlike carbon (DLC) coating on Mo-tip field emitter arrays by a layer-by-layer technique using plasma-enhanced chemical vapor deposition. The Spindt-type molybdenum tip is used as an emission source without a resistive layer on the silicon substrate. The maximum emission current for each pixel was increased from 160 to 1520 mu A by a 20 nm N-doped DLC coating. Furthermore, the emission current from DLC-coated field emitter arrays (FEAs) is more stable than that of noncoated FEAs. (C) 1998 American Vacuum Society. [S0734-211X(98)07302-8]. English AMER INST PHYSICS Effect of N doping on the electron emission properties of diamondlike carbon film on a 2-in. Mo field emitter array panel Article 10.1116/1.589886 1 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.16, no.2, pp.705 - 709 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 16 2 705 709 scie scopus 000073167200043 2-s2.0-0039098604 Engineering, Electrical & Electronic Nanoscience & Nanotechnology Physics, Applied Engineering Science & Technology - Other Topics Physics Article; Proceedings Paper field emission