Jang, JW Cho, WJ Lee, JH Kim, IT Kim, YH Kim, CH Park, JH Choi, SS Hahn, TS 2024-01-21T18:01:20Z 2024-01-21T18:01:20Z 2021-09-01 1997-11 0021-4922 https://pubs.kist.re.kr/handle/201004/143538 We report 90 degrees domains in (110)-oriented polycrystalline BaTiO3 thin films. The domain and crystal structures of the thin films were investigated using transmission electron microscopy and high temperature X-ray diffraction, respectively. From X-ray diffraction, it was found that the prepared films had a (110)-preferred orientation and a tetragonal structure at room temperature. Observation in the plan-view and cross-sectional modes using transmission electron microscopy clearly indicated the presence of a 90 degrees domain structure. In the cross-sectional mode, a 90 degrees domain structure was observed along the film growth direction and in the plan-view mode, it was also found that a 90 degrees domain boundary was initiated from the (111) twin boundary. The formation of a 90 degrees domain boundary was discussed in terms of planar defects such as the (111) twin and we also proposed two kinds of stress relief mechanisms induced by 90 degrees domain formation. English JAPAN J APPLIED PHYSICS CHEMICAL-VAPOR-DEPOSITION TECHNOLOGY STRESSES Ninety degree domains in RF-sputtered BaTiO3 thin films on platinum substrates Article 10.1143/JJAP.36.6937 1 JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, v.36, no.11, pp.6937 - 6941 JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS 36 11 6937 6941 scie scopus 000071172300069 2-s2.0-0031271231 Physics, Applied Physics Article CHEMICAL-VAPOR-DEPOSITION TECHNOLOGY STRESSES BaTiO3 thin films 90 degrees domains film stresses (110)-preferred orientation (111) twins