Kim, ST Kim, JB Jung, MH Ahn, KD 2024-01-21T18:02:20Z 2024-01-21T18:02:20Z 2022-01-11 1997-10 0170-0839 https://pubs.kist.re.kr/handle/201004/143555 N-(10-Camphorsulfonyloxy)maleimide (CSOMI) have been copolymerized with two t-BOC protected vinyllactams, 3-(t-butoxycarbonyl)-1-vinyl-2-pyrrolidinone (BCVP) and 3-(t-butoxycarbonyl)-1-vinylcaprolactam (BCVC) to make photoacid-generating polymers P(CSOMI/BCVP) and P(CSOMI/BCVC), respectively. The thermal and photoacidolytic deprotection of the t-BOG protected copolymers readily underwent by UV exposure and solubilities of the polymers were remarkably changed thereafter. The polymers were proved to have the capability of a single-component, chemically amplified resist system in the deep-UV region without addition of any photoacid generator, because the polymers themselves photochemically generate a bulky 10-camphorsulfonic acid (SCA). The polymer films gave positive tone images by irradiation with electron beam (EB) and development with aqueous base solutions. English SPRINGER VERLAG CHEMICAL AMPLIFICATION POLYMERS Copolymers of camphorsulfonyloxymaleimide and t-BOC protected vinyllactams for applications as single-component resists Article 10.1007/s002890050168 1 POLYMER BULLETIN, v.39, no.4, pp.423 - 430 POLYMER BULLETIN 39 4 423 430 scie scopus A1997YD33300005 2-s2.0-0343432108 Polymer Science Polymer Science Article CHEMICAL AMPLIFICATION POLYMERS