고석근 조준식 최원국 K. H. Kim S. C. Choi Y. S. Yoon 정형진 2024-01-21T18:02:54Z 2024-01-21T18:02:54Z 2022-01-10 1997-10 https://pubs.kist.re.kr/handle/201004/143565 Ion beam and its applications Article 3 한국진공학회지 ., v.6, no.S1, pp.110 - 114 한국진공학회지 . 6 S1 110 114