전법주 오인환 임태훈 정일현 2024-01-21T18:14:27Z 2024-01-21T18:14:27Z 2022-01-10 1997-06 1225-0112 https://pubs.kist.re.kr/handle/201004/143759 한국공업화학회 Effects on the oxidation rate with silicon orientation and its surface morphology 실리콘배향에 따른 산화 속도 영향과 표면 Morphology Article 2 Journal of the Korean Industrial and Engineering Chemistry = 공업화학, v.8, no.3, pp.395 - 402 Journal of the Korean Industrial and Engineering Chemistry = 공업화학 8 3 395 402 ECRCVD a-Si:H silicon orientation surface morphology