Kim, S.-T. Kim, J.-B. Kim, J.-M. Chung, C.-M. Ahn, K.-D. 2024-01-21T18:16:05Z 2024-01-21T18:16:05Z 2021-09-02 1997-06 0914-9244 https://pubs.kist.re.kr/handle/201004/143787 [No abstract available] English Tokai University High resolution single-component resists based on terpolymers having photoacid-generating camphorsulfonyloxymaleimide units Article 10.2494/photopolymer.10.489 1 Journal of Photopolymer Science and Technology, v.10, no.3, pp.489 - 492 Journal of Photopolymer Science and Technology 10 3 489 492 scopus 2-s2.0-0542380891 Article Camphorsulfnyloxymaleimide Photo-acid generation Terpolymers