Lee, S Lee, S Lee, S Jeon, D Lee, KR 2024-01-21T18:38:07Z 2024-01-21T18:38:07Z 2021-09-04 1997-03 1071-1023 https://pubs.kist.re.kr/handle/201004/143930 Silicon field emitter tips are coated with diamondlike carbon (DLC) film. Argon-ion bombardment of the tips increased the aspect ratio and helped uniform DLC coating. Using DLC-coated tips, we have fabricated a self-aligned gated field emission array. (C) 1997 American Vacuum Society. English A V S AMER INST PHYSICS FIELD Self-aligned silicon tips coated with diamondlike carbon Article 10.1116/1.589598 1 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.15, no.2, pp.457 - 459 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 15 2 457 459 scie scopus A1997WU26700053 2-s2.0-9144246347 Engineering, Electrical & Electronic Nanoscience & Nanotechnology Physics, Applied Engineering Science & Technology - Other Topics Physics Article; Proceedings Paper FIELD DLC