Lee, S Ju, BK Lee, YH Jeon, D Oh, MH 2024-01-21T18:38:10Z 2024-01-21T18:38:10Z 2021-09-04 1997-03 1071-1023 https://pubs.kist.re.kr/handle/201004/143931 We have fabricated a gated silicon held emitter array for which the silicon tips are coated with a diamondlike-carbon him (DLC). Silicon oxide disks were patterned on the silicon substrate, and the tips were formed using conventional dry etching. With the oxide caps covering the tips, the insulating layer, molybdenum gate film, and aluminum parting layer were deposited. At this stage the oxide caps were removed to expose the silicon tips and a DLC-carbon film was deposited onto the tips. (C) 1997 American Vacuum Society. English American Institute of Physics Fabrication and field emission study of gated diamondlike-carbon-coated silicon tips Article 10.1116/1.589330 1 Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, v.15, no.2, pp.425 - 427 Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 15 2 425 427 N scopus A1997WU26700044 Engineering, Electrical & Electronic Nanoscience & Nanotechnology Physics, Applied Engineering Science & Technology - Other Topics Physics Article; Proceedings Paper ELECTRON FED field emitter dlc insulating film