윤영수 2024-01-21T19:03:37Z 2024-01-21T19:03:37Z 2022-01-10 1997-01 https://pubs.kist.re.kr/handle/201004/144133 Fabrication processes and problems of microelectromechanical system devices based on piezoelectric PZT film and surface micromachining techniques Article 3 Ceramic technique., v.12, pp.364 - ? Ceramic technique. 12 364 ?