Kim, JH Wang, L Zurn, SM Li, L Yoon, YS Polla, DL 2024-01-21T19:07:15Z 2024-01-21T19:07:15Z 2021-09-01 1997-01 1058-4587 https://pubs.kist.re.kr/handle/201004/144194 This paper discusses the fabrication process and challenges for fabrication of piezoelectric cantilever beam microaccelerometers by using surface micromachining techniques. PZT thin films were used as the piezoelectric material to detect the acceleration of the cantilever beam. In this paper, we discuss in detail the process challenges encountered in piezoelectric microaccelerometers. These major challenges include PZT thin film deposition and encapsulation during final micromachining membrane release. English GORDON BREACH SCI PUBL LTD Fabrication process of PZT piezoelectric cantilever unimorphs using surface micromachining Article 10.1080/10584589708015723 1 INTEGRATED FERROELECTRICS, v.15, no.1-4, pp.325 - 332 INTEGRATED FERROELECTRICS 15 1-4 325 332 scie scopus A1997WR71500034 Engineering, Electrical & Electronic Physics, Applied Physics, Condensed Matter Engineering Physics Article