Eun, KY Lee, KR Yoon, ES Kong, HS 2024-01-21T19:07:46Z 2024-01-21T19:07:46Z 2021-09-04 1996-12-15 0257-8972 https://pubs.kist.re.kr/handle/201004/144203 Tribological behaviors between diamond-like carbon (DLC) films and steel ball (AISI 52100) were investigated under a vacuum (4x10(-3) Pa) and ambient air with controlled relative humidity. The DLC films were prepared on Si wafer by r.f. plasma assisted chemical vapor deposition using benzene (C6H6) at a pressure of 1.33 Pa. In the present work, we focused on the friction behavior with increasing number of passes. In high vacuum, the coefficient of friction under the normal load of 4.9 N, decreases from 0.15 to a minimum value of 0.04 at about 200 passes. For higher number of passes, however, the coefficient fluctuated in the range from 0.1 to 0.3. This instability of friction was not observed under higher loads in high vacuum. The present work showed that the oxidation of the DLC surface occurs during the tribe-test even in high vacuum, which results in the formation of polymeric roll-shaped debris. The instability in friction was related to the formation of the polymeric debris. In humid air, the coefficient of friction was measured between 0.15 and 0.2. Fluctuated behavior of friction, however, was not observed in humid air. English ELSEVIER SCIENCE SA LAUSANNE CHEMICAL VAPOR-DEPOSITION AMORPHOUS-CARBON THIN-FILMS WEAR FRICTION SILICON LAYERS VACUUM Effect of polymeric debris on the tribological behavior of diamond-like carbon films Article 10.1016/S0257-8972(96)02966-0 1 SURFACE & COATINGS TECHNOLOGY, v.86-7, no.1-3, pp.569 - 574 SURFACE & COATINGS TECHNOLOGY 86-7 1-3 569 574 scie scopus A1996WC00600020 2-s2.0-0030384478 Materials Science, Coatings & Films Physics, Applied Materials Science Physics Article; Proceedings Paper CHEMICAL VAPOR-DEPOSITION AMORPHOUS-CARBON THIN-FILMS WEAR FRICTION SILICON LAYERS VACUUM diamond-like carbon tribology polymeric debris stability in friction