Chung, B Cho, H Lee, S Ko, TY Lee, JY Jeon, D Lee, KR Joo, BK Oh, MH 2024-01-21T19:15:50Z 2024-01-21T19:15:50Z 2021-09-05 1996-09 1155-4339 https://pubs.kist.re.kr/handle/201004/144341 We have coated the silicon field emission tips with diamond-like carbon (DLC). The array of tips was made of n-type silicon using conventional dry etch. Before DLC coating, the tips were bombarded with argon ion to clean the surface. We found that this bombardment improved the aspect ratio of the tips and the DLC adhesion to the silicon tips. The DLC film was coated using radio frequency plasma assisted-CVD using C6H6 gas. Initially, the end of the tips was coated with ball-shape DLC. The current-voltage curve was measured in 10(-6) Torr pressure. The DLC-coated tips emitted current at lower onset voltage than as-prepared silicon tips. English EDITIONS PHYSIQUE Silicon field emitters coated with diamond-like carbon Article 10.1051/jp4:1996513 1 JOURNAL DE PHYSIQUE IV, v.6, no.C5, pp.85 - 89 JOURNAL DE PHYSIQUE IV 6 C5 85 89 scie scopus A1996WF80000016 2-s2.0-0345033526 Physics, Multidisciplinary Physics Article; Proceedings Paper DLC