Chae, HB Park, KH Seong, DJ Kim, JC Baik, YJ 2024-01-21T19:36:53Z 2024-01-21T19:36:53Z 2021-09-05 1996-05 0195-928X https://pubs.kist.re.kr/handle/201004/144464 Diamond films 60 and 170 mu m in thickness were grown by PACVD (plasma-assisted chemical vapor deposition) under similar conditions. The thermal diffusivity of these freestanding films was measured between 100 and 800 K using AC calorimetry. Radiation heat loss from the surface was estimated by analyzing both the amplitude and the phase shift of a lock-in amplifier signal. Thermal conductivity was calculated using the specific heat data of natural diamond. At room temperature, the thermal conductivity of the 60 and 170 mu m films is 9 and 16 W . cm(-1). K-1 respectively, which is 40-70% that of natural diamond. The temperature dependence of thermal conductivity of the CVD diamond films is similar to that of natural diamond. Phonon scattering processes are considered using the Debye model. The microsite of the grain boundary has a significant effect on the mean free path of phonons at low temperatures. The grain in CVD diamond film is grown as a columnar structure. Thus, the thicker film has the larger mean grain size and the higher thermal conductivity. Scanning electron microscopy (SEM) and Raman spectroscopy were used to study the microstructure of the CVD diamond films. In this experiment, we evaluated the quality of CVD diamond film of the whole sample by measuring the thermal conductivity. English PLENUM PUBL CORP Thermal conductivity of CVD diamond films Article 10.1007/BF01441515 1 INTERNATIONAL JOURNAL OF THERMOPHYSICS, v.17, no.3, pp.695 - 703 INTERNATIONAL JOURNAL OF THERMOPHYSICS 17 3 695 703 scie scopus A1996UH49600015 2-s2.0-0030150157 Thermodynamics Chemistry, Physical Mechanics Physics, Applied Thermodynamics Chemistry Mechanics Physics Article; Proceedings Paper AC calorimetry CVD diamond film Debye phonon model grain boundary thermal conductivity thermal diffusivity U-process