김성일 민석기 김은규 박세기 이천 2024-01-21T20:03:09Z 2024-01-21T20:03:09Z 2022-01-10 1996-01 https://pubs.kist.re.kr/handle/201004/144679 A formation of carbon micro-pattern by laser-induced deposition with CCl//2F//2 gas. Article 3 Bulletin of the Korean physical society, v.v. 14, no.no. 2, pp.543 - ? Bulletin of the Korean physical society v. 14 no. 2 543 ? MOCVD