김성일 민석기 김은규 최범호 황성우 정석구 김태근 2024-01-21T20:07:53Z 2024-01-21T20:07:53Z 2022-01-10 1996-01 https://pubs.kist.re.kr/handle/201004/144760 100 ㎚ electron beam lithography using a modified scanning electron microscope. Article 3 Bulletin of the Korean physical society, v.v. 14, no.no. 2, pp.539 - ? Bulletin of the Korean physical society v. 14 no. 2 539 ? MOCVD