배귀남 Patrick D. Kinney David Y. H. Pui. Benjamin Y. H. Liu 2024-01-21T20:08:07Z 2024-01-21T20:08:07Z 2022-01-10 1996-01 https://pubs.kist.re.kr/handle/201004/144764 Particle behaviorin vacuum systems : Article 3 Journal of the institute of environmental sciences, v.Nov./Dec., pp.40 - 45 Journal of the institute of environmental sciences Nov./Dec. 40 45 particle