임상우 설용건 최지원 이전국 정형진 2024-01-21T21:02:40Z 2024-01-21T21:02:40Z 2022-01-10 1995-01 0304-128X https://pubs.kist.re.kr/handle/201004/145222 한국화학공학회 / Korean Institute of Chemical Engineers Preparation of piezoelectric ZnO thin films by RF magnetron sputtering method and their surface analysis RF magnetron sputtering 법을 이용한 압전성 ZnO 박막의 제조 및 그 표면분석 Article 2 화학공학 = Journal of the Korean Institute of Chemical Engineers, v.33, no.2, pp.235 - 242 화학공학 = Journal of the Korean Institute of Chemical Engineers 33 2 235 242