YOON, YS YOON, YK LEE, JY YOM, SS 2024-01-21T21:35:43Z 2024-01-21T21:35:43Z 2021-09-02 1994-07 0021-4922 https://pubs.kist.re.kr/handle/201004/145551 Surface morphologies of BaTiO3 thin films have been studied by atomic force microscopy (AFM). The films on (111)InSb, indium tin oxide (ITO)-coated glass and (100)Si substrates are deposited by in-situ metalorganic chemical vapor deposition (MOCVD) at different deposition temperatures of 300-degrees-C, 400-degrees-C and 600-degrees-C, respectively. AFM under ambient conditions showed that the BaTiO3 film deposited on the ITO-coated glass had a smooth surface consisting of large hemispherical grains, while the film on (100)Si had a slightly rough surface with [110]textured rectangular grains. As-grown film on the (111)InSb substrate was in the amorphous phase except near the interface, resulting in a rough surface. Our results of dependence on the kind of substrates and growth temperature suggest that the surface morphology of the as-grown films is strongly influenced by the crystallinity and growing characteristic of the film. For low-temperature growth below the deposition temperature of 600-degrees-C, surface roughness of the BaTiO3 film is strongly dependent on growth temperature rather than crystallinity of the films related to substrates. English JAPAN SOC APPLIED PHYSICS CHEMICAL VAPOR-DEPOSITION PULSED LASER DEPOSITION BARIUM-TITANATE FILMS ELECTRICAL-PROPERTIES EPITAXIAL-GROWTH BUFFER LAYERS SUBSTRATE SILICON SURFACE MORPHOLOGIES OF BATIO3 THIN-FILMS BY ATOMIC-FORCE MICROSCOPY Article 10.1143/JJAP.33.4075 1 JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, v.33, no.7A, pp.4075 - 4079 JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS 33 7A 4075 4079 scie scopus A1994PE44700051 Physics, Applied Physics Article CHEMICAL VAPOR-DEPOSITION PULSED LASER DEPOSITION BARIUM-TITANATE FILMS ELECTRICAL-PROPERTIES EPITAXIAL-GROWTH BUFFER LAYERS SUBSTRATE SILICON BATIO3 THIN FILM MOCVD AFM SI INSB ITO GLASS