김용태 이창우 2024-01-21T21:45:08Z 2024-01-21T21:45:08Z 2022-01-10 1994-01 https://pubs.kist.re.kr/handle/201004/145706 Stress relaxation in plasma deposited tungsten nitride/tungsten bilayer. Article 3 Appl. phys. lett., v.v. 65, no.no. 8, pp.965 - 967 Appl. phys. lett. v. 65 no. 8 965 967